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Micro-Opto-Mechanical Systems (MOMS) are a special class of Micro Electro-Mechanical Systems (MEMS) which use optical and mechanical, but not electrical components.
- Microelectromechanical Systems (MEMS)
- Micro-Opto-Electromechanical Systems (MOEMS)
- Nanoelectromechanical Systems (NEMS)
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